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Reactive sputtering of ZnO:Al thin films from rotatable dual metallic targets
Reactive sputtering of ZnO:Al thin films from rotatable dual metallic targets
Reactive sputtering of ZnO:Al thin films from rotatable dual metallic targets
Zhu, H. (Autor:in) / Hupkes, J. (Autor:in) / Bunte, E. (Autor:in) / Huang, S. M. (Autor:in)
APPLIED SURFACE SCIENCE ; 259 ; 582-589
01.01.2012
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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