IC-Compatible Polysilicon Surface Micromachining

Sniegowski, J. J. / de Boer, M. P. | British Library Online Contents | 2000

Surface evolution models in abrasive jet micromachining

Ghobeity, A. / Krajac, T. / Burzynski, T. et al. | British Library Online Contents | 2008

Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining

Song, X. / Rajgopal, S. / Melzak, J. M. et al. | British Library Online Contents | 2002

Micromachining for rf Communications

Young, D. J. | British Library Online Contents | 2001

Lateral RF MEMS Switch Based on Surface Micromachining Process

Du, G.P. / Zhu, J. / Yu, Y.W. et al. | British Library Online Contents | 2011