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Surface Micromachining: A Brief Introduction

Mehregany, M. / Zorman, C. A.

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Surface Micromachining: A Brief Introduction

Mehregany, M. / Zorman, C. A.

Surface Micromachining: A Brief Introduction

Mehregany, M. / Zorman, C. A.

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Order at Subito €

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Title:

Surface Micromachining: A Brief Introduction

Contributors:

Mehregany, M. (author) / Zorman, C. A. (author)

Published in:

MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 26 ; 289-290

Publication date:

2001-01-01

Size:

2 pages

ISSN:

0883-7694

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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