Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining

Song, X. / Rajgopal, S. / Melzak, J. M. et al. | British Library Online Contents | 2002

Surface Micromachining: A Brief Introduction

Mehregany, M. / Zorman, C. A. | British Library Online Contents | 2001

Surface evolution models in abrasive jet micromachining

Ghobeity, A. / Krajac, T. / Burzynski, T. et al. | British Library Online Contents | 2008

Surface topography evolution and fatigue fracture of polysilicon

Allameh, S. M. / Shrotriya, P. / Butterwick, A. et al. | British Library Online Contents | 2003

Micromachining for rf Communications

Young, D. J. | British Library Online Contents | 2001