Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining
Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining
Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining
Song, X. (Autor:in) / Rajgopal, S. (Autor:in) / Melzak, J. M. (Autor:in) / Zorman, C. A. (Autor:in) / Mehregany, M. (Autor:in)
MATERIALS SCIENCE FORUM ; 389/393 ; 755-758
01.01.2002
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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