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Conductimetry and impedance spectroscopy study of low pressure metal organic chemical vapor deposition TiNxOy films as a function of the growth temperature: a percolation approach
Conductimetry and impedance spectroscopy study of low pressure metal organic chemical vapor deposition TiNxOy films as a function of the growth temperature: a percolation approach
Conductimetry and impedance spectroscopy study of low pressure metal organic chemical vapor deposition TiNxOy films as a function of the growth temperature: a percolation approach
Fabreguette, F. (Autor:in) / Maglione, M. (Autor:in) / Imhoff, L. (Autor:in) / Domenichini, B. (Autor:in) / Marco de Lucas, M. C. (Autor:in) / Sibillot, P. (Autor:in) / Bourgeois, S. (Autor:in) / Sacilotti, M. (Autor:in)
APPLIED SURFACE SCIENCE ; 175-176 ; 574-578
01.01.2001
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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