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Microstructural properties of amorphous carbon nitride films synthesised by dc magnetron sputtering
Microstructural properties of amorphous carbon nitride films synthesised by dc magnetron sputtering
Microstructural properties of amorphous carbon nitride films synthesised by dc magnetron sputtering
Fitzgerald, A. G. (author) / Jiang, L. (author) / Rose, M. J. (author) / Dines, T. J. (author)
APPLIED SURFACE SCIENCE ; 175-176 ; 525-530
2001-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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