Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Properties of amorphous Si-rich silicon nitride prepared by rf-magnetron sputtering
Properties of amorphous Si-rich silicon nitride prepared by rf-magnetron sputtering
Properties of amorphous Si-rich silicon nitride prepared by rf-magnetron sputtering
Vetter, M. (Autor:in) / Rojahn, M. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 71 ; 321 - 326
01.01.2000
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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