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Long-term stability and electrical properties of fluorine doped polysilicon IC-resistors
Long-term stability and electrical properties of fluorine doped polysilicon IC-resistors
Long-term stability and electrical properties of fluorine doped polysilicon IC-resistors
Rydberg, M. (Autor:in) / Smith, U. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 373-382
01.01.2001
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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