Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
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The chemical composition changes of silicon and phosphorus in the process of native oxide formation of heavily phosphorus doped silicon
The chemical composition changes of silicon and phosphorus in the process of native oxide formation of heavily phosphorus doped silicon
The chemical composition changes of silicon and phosphorus in the process of native oxide formation of heavily phosphorus doped silicon
Ying, W. B. (Autor:in) / Mizokawa, Y. (Autor:in) / Kamiura, Y. (Autor:in) / Kawamoto, K. (Autor:in) / Yang, W. Y. (Autor:in)
APPLIED SURFACE SCIENCE ; 181 ; 1-14
01.01.2001
14 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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