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The effect of postdeposition annealing on chemical bonding in amorphous carbon nitride films prepared by dc magnetron sputtering
The effect of postdeposition annealing on chemical bonding in amorphous carbon nitride films prepared by dc magnetron sputtering
The effect of postdeposition annealing on chemical bonding in amorphous carbon nitride films prepared by dc magnetron sputtering
Jiang, L. (Autor:in) / Fitzgerald, A. G. (Autor:in) / Rose, M. J. (Autor:in)
APPLIED SURFACE SCIENCE ; 181 ; 331-338
01.01.2001
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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