Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
A Study of the Thermal Annealing Influence on the Structure and Phase Composition of Silicon Carbonitride Films by the Diffraction of Synchrotron Radiation
A Study of the Thermal Annealing Influence on the Structure and Phase Composition of Silicon Carbonitride Films by the Diffraction of Synchrotron Radiation
A Study of the Thermal Annealing Influence on the Structure and Phase Composition of Silicon Carbonitride Films by the Diffraction of Synchrotron Radiation
Fainer, N. I. (Autor:in) / Maximovski, E. A. (Autor:in) / Kosinova, M. L. (Autor:in) / Rumyantsev, Y. M. (Autor:in)
MATERIALS SCIENCE FORUM ; 378/381 ; 493-498
01.01.2001
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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