Structural and optical properties of amorphous hydrogenated silicon carbonitride films produced by PECVD

Vassallo, E. / Cremona, A. / Ghezzi, F. et al. | British Library Online Contents | 2006

Optical properties and local atomic order in non hydrogenated amorphous silicon carbonitride films

Doucey, B. / Cuniot, M. / Moudni, R. et al. | British Library Online Contents | 2002

Predicting structural properties of amorphous silicon carbonitride by atomistic simulation

Liao, Ningbo / Zhang, Miao / Raj, Rishi et al. | British Library Online Contents | 2016

Influence of radiofrequency power on compositional, structural and optical properties of amorphous silicon carbonitride films

Peng, Y. / Zhou, J. / Zhang, Z. et al. | British Library Online Contents | 2010

Mechanical stresses in silicon carbonitride films obtained by PECVD from hexamethyldisilazane

Shayapov, V. R. / Rumyantsev, Y. M. / Dzyuba, A. A. et al. | British Library Online Contents | 2013