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Defect imaging of SiGe strain relaxed buffers grown by LEPECVD
Defect imaging of SiGe strain relaxed buffers grown by LEPECVD
Defect imaging of SiGe strain relaxed buffers grown by LEPECVD
Marchionna, S. (Autor:in) / Virtuani, A. (Autor:in) / Acciarri, M. (Autor:in) / Isella, G. (Autor:in) / von Kaenel, H. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 802-805
01.01.2006
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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