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Stress determination in strained-Si grown on ultra-thin SiGe virtual substrates
Stress determination in strained-Si grown on ultra-thin SiGe virtual substrates
Stress determination in strained-Si grown on ultra-thin SiGe virtual substrates
Perova, T. S. (Autor:in) / Lyutovich, K. (Autor:in) / Kasper, E. (Autor:in) / Waldron, A. (Autor:in) / Oehme, M. (Autor:in) / Moore, R. A. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 135 ; 192-194
01.01.2006
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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