Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide

Hishida, Y. / Watanabe, M. / Nakashima, K. et al. | British Library Online Contents | 2000

Excimer laser annealing of B and BF2 implanted Si

Monakhov, E. V. / Svensson, B. G. / Linnarsson, M. K. et al. | British Library Online Contents | 2005

Characterization of Excimer Laser Annealing of Arsenic Implanted Silicon

Akane, T. / Mastumoto, S. / Mizushima, I. | British Library Online Contents | 1993

Electrical Activation of Ion-Implanted Nitrogen and Aluminum in 4H-SiC by Excimer Laser Annealing

Tanaka, Y. / Tanoue, H. / Arai, K. | British Library Online Contents | 2003

Activation Treatment of Ion Implanted Dopants Using Hybrid Super RTA Equipment

Kinoshita, A. / Senzaki, J. / Katou, M. et al. | British Library Online Contents | 2006