Characterization of Excimer Laser Annealing of Arsenic Implanted Silicon

Akane, T. / Mastumoto, S. / Mizushima, I. | British Library Online Contents | 1993

Defect annealing in ion implanted silicon carbide

Calcagno, L. / Grimaldi, M. G. / Musumeci, P. | British Library Online Contents | 1997

Excimer laser annealing of B and BF2 implanted Si

Monakhov, E. V. / Svensson, B. G. / Linnarsson, M. K. et al. | British Library Online Contents | 2005

Laser annealing of Al implanted silicon carbide: Structural and optical characterization

Boutopoulos, C. / Terzis, P. / Zergioti, I. et al. | British Library Online Contents | 2007

Defect production and annealing in ion implanted silicon carbide

Heft, A. / Wendler, E. / Bachmann, T. et al. | British Library Online Contents | 1995