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Micro-Structural and Electrical Properties of Al-Implanted & Lamp-Annealed 4H-SiC
Micro-Structural and Electrical Properties of Al-Implanted & Lamp-Annealed 4H-SiC
Micro-Structural and Electrical Properties of Al-Implanted & Lamp-Annealed 4H-SiC
Nakamura, H. (Autor:in) / Watanabe, H. (Autor:in) / Yamazaki, J. (Autor:in) / Tanaka, N. (Autor:in) / Malhan, R. K. (Autor:in)
MATERIALS SCIENCE FORUM ; 389/393 ; 807-810
01.01.2002
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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