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Electrical and Structural Properties of Al-Implanted and Annealed 4H-SiC
Electrical and Structural Properties of Al-Implanted and Annealed 4H-SiC
Electrical and Structural Properties of Al-Implanted and Annealed 4H-SiC
Obernhofer, M. (Autor:in) / Krieger, M. (Autor:in) / Schmid, F. (Autor:in) / Weber, H. B. (Autor:in) / Pensl, G. (Autor:in) / Schoner, A. (Autor:in) / Wright, N. / Johnson, C. M. / Vassilevski, K. / Nikitina, I.
01.01.2007
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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