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Comparison between Chemical and Electrical Profiles in Al^+ or N^+ Implanted and Annealed 6H-SiC
Comparison between Chemical and Electrical Profiles in Al^+ or N^+ Implanted and Annealed 6H-SiC
Comparison between Chemical and Electrical Profiles in Al^+ or N^+ Implanted and Annealed 6H-SiC
Nipoti, R. (Autor:in) / Carnera, A. (Autor:in) / Raineri, V. (Autor:in)
MATERIALS SCIENCE FORUM ; 389/393 ; 811-814
01.01.2002
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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