Silicon carbide CVD homoepitaxy on wafers with reduced micropipe density

Saddow, S.E. / Mazzola, M.S. / Rendakova, S.V. et al. | British Library Online Contents | 1999

Growth of Low Micropipe Density SiC Wafers

Powell, A. / Wang, S. / Brandes, G. | British Library Online Contents | 2000

100 mm 4HN-SiC Wafers with Zero Micropipe Density

Leonard, R.T. / Khlebnikov, Y. / Powell, A.R. et al. | British Library Online Contents | 2009

Large area silicon carbide devices fabricated on SiC wafers with reduced micropipe density

Dmitriev, V. / Rendakova, S. / Kuznetsov, N. et al. | British Library Online Contents | 1999

4H-SiC CVD Epitaxial Layers with Improved Structural Quality Grown on SiC Wafers with Reduced Micropipe Density

Kalinina, E. V. / Zubrilov, A. / Solov'ev, V. et al. | British Library Online Contents | 2000