Comparison of high temperature annealed Czochralski silicon wafers and epitaxial wafers

Graef, D. / Lambert, U. / Brohl, M. et al. | British Library Online Contents | 1996

Crystal-related defects evolution during thin epitaxial layer growth on silicon wafers

Borionetti, G. / Gambaro, D. / Santi, S. et al. | British Library Online Contents | 2000

Carrier Generation Lifetime in 4H-SiC Epitaxial Wafers

Chung, G.Y. / Loboda, M.J. / Marninella, M.J. et al. | British Library Online Contents | 2009

Epitaxial Growth of n-Type 4H-SiC on 3 Wafers for Power Devices

Thomas, B. / Hecht, C. | British Library Online Contents | 2005

Uniformity Improvement of Planetary Epitaxial Growth Processes through Analysis of Intentionally Stalled SiC Wafers

Oliver, J.D. / Ponczak, B.H. / Parikh, R.P. et al. | British Library Online Contents | 2009