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A platform for research: civil engineering, architecture and urbanism
Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining
Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining
Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining
Song, X. (author) / Rajgopal, S. (author) / Melzak, J. M. (author) / Zorman, C. A. (author) / Mehregany, M. (author)
MATERIALS SCIENCE FORUM ; 389/393 ; 755-758
2002-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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