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Thermodynamical computation and physicochemical characterization of thin films deposited by electric-discharge-assisted chemical vapor deposition
Thermodynamical computation and physicochemical characterization of thin films deposited by electric-discharge-assisted chemical vapor deposition
Thermodynamical computation and physicochemical characterization of thin films deposited by electric-discharge-assisted chemical vapor deposition
Sassi, Z. (Autor:in) / Chafik, K. (Autor:in) / Bureau, J. C. (Autor:in) / Glachant, A. (Autor:in) / Balland, B. (Autor:in)
APPLIED SURFACE SCIENCE ; 193 ; 26-35
01.01.2002
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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