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Thermodynamical computation and physicochemical characterization of thin films deposited by electric-discharge-assisted chemical vapor deposition
Thermodynamical computation and physicochemical characterization of thin films deposited by electric-discharge-assisted chemical vapor deposition
Thermodynamical computation and physicochemical characterization of thin films deposited by electric-discharge-assisted chemical vapor deposition
Sassi, Z. (author) / Chafik, K. (author) / Bureau, J. C. (author) / Glachant, A. (author) / Balland, B. (author)
APPLIED SURFACE SCIENCE ; 193 ; 26-35
2002-01-01
10 pages
Article (Journal)
English
DDC:
621.35
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