Self-Annealing Textures of Copper Damascene Interconnects

Lee, D. N. / Lee, H. J. | British Library Online Contents | 2004

Microstructure of a Damascene sabre after annealing

Reibold, M. / Levin, A. A. / Meyer, D. C. et al. | British Library Online Contents | 2006

Texture Investigation in Cu Damascene Interconnects during Annealing

Cho, J. Y. / Lee, H. J. / Kim, H. et al. | British Library Online Contents | 2005

Texture Investigations In Damascene Copper Interconnects

Mirpuri, K. / Szpunar, J. A. / Kozaczek, K. | British Library Online Contents | 2002

Molecular dynamics study of copper trench filling in damascene process

Hong, R. T. / Huang, M. J. / Yang, J. Y. | British Library Online Contents | 2005