Effect of Trench Aspect Ratio on Microstructure and Texture in Damascene Cu Interconnects

Chen, L. / Yuan, G.J. / Xu, J.G. et al. | British Library Online Contents | 2012

Texture Investigations In Damascene Copper Interconnects

Mirpuri, K. / Szpunar, J. A. / Kozaczek, K. | British Library Online Contents | 2002

Self-Annealing Textures of Copper Damascene Interconnects

Lee, D. N. / Lee, H. J. | British Library Online Contents | 2004

Texture Investigation in Cu Damascene Interconnects during Annealing

Cho, J. Y. / Lee, H. J. / Kim, H. et al. | British Library Online Contents | 2005

Molecular dynamics study of copper trench filling in damascene process

Hong, R. T. / Huang, M. J. / Yang, J. Y. | British Library Online Contents | 2005