Formation of Slit-Like Voids at Trench Corners of Damascene Cu Interconnects: Fid-Bau Portal

Formation of Slit-Like Voids at Trench Corners of Damascene Cu Interconnects

Sekiguchi, A. / Koike, J. / Maruyama, K.

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Formation of Slit-Like Voids at Trench Corners of Damascene Cu Interconnects

Sekiguchi, A. / Koike, J. / Maruyama, K.

Formation of Slit-Like Voids at Trench Corners of Damascene Cu Interconnects

Sekiguchi, A. / Koike, J. / Maruyama, K.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Formation of Slit-Like Voids at Trench Corners of Damascene Cu Interconnects

Contributors:

Sekiguchi, A. (author) / Koike, J. (author) / Maruyama, K. (author)

Published in:

MATERIALS TRANSACTIONS ; 43 ; 1633-1637

Publication date:

2002-01-01

Size:

5 pages

ISSN:

1345-9678

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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