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Structural and Thermal Behaviour of a W-Ti-N Sputtered Film after Thermal Annealing
Structural and Thermal Behaviour of a W-Ti-N Sputtered Film after Thermal Annealing
Structural and Thermal Behaviour of a W-Ti-N Sputtered Film after Thermal Annealing
Le Patezour, E. (Autor:in) / Cavaleiro, A. (Autor:in) / Vieira, T.
01.01.2002
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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