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Hydrogen ion diffusion coefficient of silicon nitride thin films
Hydrogen ion diffusion coefficient of silicon nitride thin films
Hydrogen ion diffusion coefficient of silicon nitride thin films
Yu, G. T. (Autor:in) / Yen, S. K. (Autor:in)
APPLIED SURFACE SCIENCE ; 202 ; 68-72
01.01.2002
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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