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A methodology for determining mechanical properties of freestanding thin films and MEMS materials
A methodology for determining mechanical properties of freestanding thin films and MEMS materials
A methodology for determining mechanical properties of freestanding thin films and MEMS materials
Espinosa, H. D. (Autor:in) / Prorok, B. C. (Autor:in) / Fischer, M. (Autor:in)
JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS ; 51 ; 47-67
01.01.2003
21 pages
Aufsatz (Zeitschrift)
Englisch
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