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A methodology for determining mechanical properties of freestanding thin films and MEMS materials

Espinosa, H. D. / Prorok, B. C. / Fischer, M.

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A methodology for determining mechanical properties of freestanding thin films and MEMS materials

Espinosa, H. D. / Prorok, B. C. / Fischer, M.

A methodology for determining mechanical properties of freestanding thin films and MEMS materials

Espinosa, H. D. / Prorok, B. C. / Fischer, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

A methodology for determining mechanical properties of freestanding thin films and MEMS materials

Contributors:

Espinosa, H. D. (author) / Prorok, B. C. (author) / Fischer, M. (author)

Published in:

JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS ; 51 ; 47-67

Publication date:

2003-01-01

Size:

21 pages

ISSN:

0022-5096

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 530 / 620

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