Characterization of Micro/Nano Electro-Mechanical Systems (MEMS/NEMS)

British Library Online Contents | 2005

Micro/Nanoscale Tribology of Mems Materials, Lubricants and Devices

Sundararajan, S. / Bhushan, B. | Springer Verlag | 2001

Uniaxial Tension

Reinhardt, H. W. / International Association of Fracture Mechanics of Concrete and Concrete Structures / RILEM et al. | British Library Conference Proceedings | 1996

On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications

Yan, J. / Yoshino, M. / Kuriagawa1, T. et al. | British Library Online Contents | 2001

Characterization of the polymerization of SU-8 photoresist and its applications in micro-electro-mechanical systems (MEMS)

Zhang, J. / Tan, K. L. / Gong, H. Q. | British Library Online Contents | 2001