On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications: Fid-Bau Portal

On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications

Yan, J. / Yoshino, M. / Kuriagawa1, T. / Shirakashi, T. / Syoji, K. / Komanduri, R.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren

On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications

Yan, J. / Yoshino, M. / Kuriagawa1, T. / Shirakashi, T. / Syoji, K. / Komanduri, R.

On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications

Yan, J. / Yoshino, M. / Kuriagawa1, T. / Shirakashi, T. / Syoji, K. / Komanduri, R.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren

Dokumentinformationen

Titel:

On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications

Beteiligte:

Yan, J. (Autor:in) / Yoshino, M. (Autor:in) / Kuriagawa1, T. (Autor:in) / Shirakashi, T. (Autor:in) / Syoji, K. (Autor:in) / Komanduri, R. (Autor:in)

Erschienen in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 297 ; 230 - 234

Erscheinungsdatum:

01.01.2001

Format / Umfang:

5 pages

ISSN:

0921-5093

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

British Library Online Contents | 2005

On the thermal aspects of ductile regime micro-scratching of single crystal silicon for NEMS/MEMS applications

Abdel-Aal, H. A. / Patten, J. A. / Dong, L. | British Library Online Contents | 2005

Technological processes and modeling of opto-electro-mechanical microstructures

Muller, R. / Moagar Poladian, V. / Pavelescu, I. et al. | British Library Online Contents | 2000

Characterization of the polymerization of SU-8 photoresist and its applications in micro-electro-mechanical systems (MEMS)

Zhang, J. / Tan, K. L. / Gong, H. Q. | British Library Online Contents | 2001

Molecular dynamic simulations of uniaxial tension at nanoscale of semiconductor materials for micro-electro-mechanical systems (MEMS) applications

Komanduri, R. / Chandrasekaran, N. / Raff, L. M. | British Library Online Contents | 2003

Nach oben