SIMS depth profiling and TEM imaging of the SIMS altered layer

Christofi, A. / Walker, J. F. / McPhail, D. S. | British Library Online Contents | 2008

Depth resolution and preferential sputtering in depth profiling of delta layers

Hofmann, S. / Lian, S.Y. / Han, Y.S. et al. | British Library Online Contents | 2018

Depth resolution and preferential sputtering in depth profiling of delta layers

Hofmann, S. / Lian, S.Y. / Han, Y.S. et al. | British Library Online Contents | 2018

Evaluation of BN-delta-doped multilayer reference materials for shallow depth profiling in SIMS: round-robin test

Toujou, F. / Yoshikawa, S. / Homma, Y. et al. | British Library Online Contents | 2004

Ultra Shallow Depth Profiling with SIMS

Ehrke, H.-U. | British Library Online Contents | 2008