Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Evaluation of BN-delta-doped multilayer reference materials for shallow depth profiling in SIMS: round-robin test
Evaluation of BN-delta-doped multilayer reference materials for shallow depth profiling in SIMS: round-robin test
Evaluation of BN-delta-doped multilayer reference materials for shallow depth profiling in SIMS: round-robin test
Toujou, F. (Autor:in) / Yoshikawa, S. (Autor:in) / Homma, Y. (Autor:in) / Takano, A. (Autor:in) / Takenaka, H. (Autor:in) / Tomita, M. (Autor:in) / Li, Z. (Autor:in) / Hasegawa, T. (Autor:in) / Sasakawa, K. (Autor:in) / Schuhmacher, M. (Autor:in)
APPLIED SURFACE SCIENCE ; 231/232 ; 649-652
01.01.2004
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
SIMS round-robin study of depth profiling of arsenic implants in silicon
| British Library Online Contents | 2003
Accuracy of calibrated depth by delta-doped reference materials in shallow depth profiling
| British Library Online Contents | 2008
Ultra Shallow Depth Profiling with SIMS
| British Library Online Contents | 2008
Accurate SIMS depth profiling for ultra-shallow implants using backside SIMS
| British Library Online Contents | 2003
Ultralow-energy SIMS for shallow semiconductor depth profiling
| British Library Online Contents | 2008