Accurate SIMS depth profiling for ultra-shallow implants using backside SIMS

Hongo, C. / Tomita, M. / Takenaka, M. et al. | British Library Online Contents | 2003

Ultra Shallow Depth Profiling with SIMS

Ehrke, H.-U. | British Library Online Contents | 2008

Characterization of rapid thermal processing oxynitrides by SIMS and XPS analyses

Bersani, M. / Vanzetti, L. / Sbetti, M. et al. | British Library Online Contents | 1999

SIMS backside depth profiling of ultra shallow implants

Yeo, K. L. / Wee, A. T. / See, A. et al. | British Library Online Contents | 2003

Deconvolution of very low primary energy SIMS depth profiles

Fares, B. / Gautier, B. / Dupuy, J. C. et al. | British Library Online Contents | 2006