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    Transient processes and structural transformations in SixGe1-x layers during oxygen implantation and sputtering

    New search for: Kruger, D.
    New search for: Efremov, A. A.
    New search for: Murota, J.
    New search for: Tillack, B.
    New search for: Kurps, R.
    New search for: Romanova, G. P.

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    Transient processes and structural transformations in SixGe1-x layers during oxygen implantation and sputtering

    New search for: Kruger, D.
    New search for: Efremov, A. A.
    New search for: Murota, J.
    New search for: Tillack, B.
    New search for: Kurps, R.
    New search for: Romanova, G. P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Transient processes and structural transformations in SixGe1-x layers during oxygen implantation and sputtering

    New search for: Kruger, D.
    New search for: Efremov, A. A.
    New search for: Murota, J.
    New search for: Tillack, B.
    New search for: Kurps, R.
    New search for: Romanova, G. P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Transient processes and structural transformations in SixGe1-x layers during oxygen implantation and sputtering

    Contributors:

    Kruger, D. (author) / Efremov, A. A. (author) / Murota, J. (author) / Tillack, B. (author) / Kurps, R. (author) / Romanova, G. P. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 203-204 ; 285-289

    Publication date:

    2003-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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