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Evaluation of SIMS depth resolution using delta-doped multilayers and mixing-roughness-information depth model
Evaluation of SIMS depth resolution using delta-doped multilayers and mixing-roughness-information depth model
Evaluation of SIMS depth resolution using delta-doped multilayers and mixing-roughness-information depth model
Takano, A. (Autor:in) / Homma, Y. (Autor:in) / Higashi, Y. (Autor:in) / Takenaka, H. (Autor:in) / Hayashi, S. (Autor:in) / Goto, K. (Autor:in) / Inoue, M. (Autor:in) / Shimizu, R. (Autor:in)
APPLIED SURFACE SCIENCE ; 203-204 ; 294-297
01.01.2003
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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