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Application of dynamic and combined magnetic fields in the 300mm silicon single-crystal growth
Application of dynamic and combined magnetic fields in the 300mm silicon single-crystal growth
Application of dynamic and combined magnetic fields in the 300mm silicon single-crystal growth
Tomzig, E. (Autor:in) / Virbulis, J. (Autor:in) / von Ammon, W. (Autor:in) / Gelfgat, Y. (Autor:in) / Gorbunov, L. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 347-351
01.01.2002
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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