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Application of dynamic and combined magnetic fields in the 300mm silicon single-crystal growth
Application of dynamic and combined magnetic fields in the 300mm silicon single-crystal growth
Application of dynamic and combined magnetic fields in the 300mm silicon single-crystal growth
Tomzig, E. (author) / Virbulis, J. (author) / von Ammon, W. (author) / Gelfgat, Y. (author) / Gorbunov, L. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 347-351
2002-01-01
5 pages
Article (Journal)
English
DDC:
621.38152
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