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Optical determination of thickness and composition of buried strained Si1-xGex HBT alloys
Optical determination of thickness and composition of buried strained Si1-xGex HBT alloys
Optical determination of thickness and composition of buried strained Si1-xGex HBT alloys
Scheirer, C. M. (Autor:in) / Jones, R. F. (Autor:in) / Nguyen, P. (Autor:in) / Pois, H. (Autor:in) / Zangooie, S. (Autor:in)
APPLIED SURFACE SCIENCE ; 214 ; 75-82
01.01.2003
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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