Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Substrate temperature dependence of the properties of ZAO thin films deposited by magnetron sputtering
Substrate temperature dependence of the properties of ZAO thin films deposited by magnetron sputtering
Substrate temperature dependence of the properties of ZAO thin films deposited by magnetron sputtering
Fu, E. G. (Autor:in) / Zhuang, D. M. (Autor:in) / Zhang, G. (Autor:in) / Yang, W. F. (Autor:in) / Zhao, M. (Autor:in)
APPLIED SURFACE SCIENCE ; 217 ; 88-94
01.01.2003
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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