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Controllability of Mesoscopic Surface Roughness of Sputtered Al and Al-N Films
Controllability of Mesoscopic Surface Roughness of Sputtered Al and Al-N Films
Controllability of Mesoscopic Surface Roughness of Sputtered Al and Al-N Films
Ishiguro, T. (Autor:in) / Miyamura, K. (Autor:in)
MATERIALS TRANSACTIONS ; 46 ; 3037-3043
01.01.2005
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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