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Nitrogen Delta Doping in 4H-SiC Epilayers
Nitrogen Delta Doping in 4H-SiC Epilayers
Nitrogen Delta Doping in 4H-SiC Epilayers
Henry, A. (Autor:in) / Storasta, L. (Autor:in) / Janzen, E. (Autor:in) / Bergman, P. / Janzen, E.
01.01.2003
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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