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Effects of Nitrogen Doping on the Morphology of Basal Plane Dislocations in 4H-SiC Epilayers
Effects of Nitrogen Doping on the Morphology of Basal Plane Dislocations in 4H-SiC Epilayers
Effects of Nitrogen Doping on the Morphology of Basal Plane Dislocations in 4H-SiC Epilayers
Zhang, X. (Autor:in) / Nagano, M. (Autor:in) / Tsuchida, H. (Autor:in)
MATERIALS SCIENCE FORUM ; 717/720 ; 335-338
01.01.2012
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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