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Nitrogen Delta Doping in 4H-SiC Epilayers
Nitrogen Delta Doping in 4H-SiC Epilayers
Nitrogen Delta Doping in 4H-SiC Epilayers
Henry, A. (author) / Storasta, L. (author) / Janzen, E. (author) / Bergman, P. / Janzen, E.
2003-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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