Modifications of He implantation induced cavities in silicon by MeV silicon implantation

Desgardin, P. / Barthe, M. F. / Ntsoenzok, E. et al. | British Library Online Contents | 2006

Effects of Helium Implantation on the Mechanical Properties of 4H-SiC

Barbot, J.F. / Beaufort, M.F. / Audurier, V. | British Library Online Contents | 2010

Helium desorption from cavities induced by high energy 3He and 4He implantation in silicon

Godey, S. / Ntsoenzok, E. / Sauvage, T. et al. | British Library Online Contents | 2000

Shallow Nanoporous Surface Layers Produced by Helium Ion Implantation

Johnson, P. B. / Markwitz, A. / Gilberd, P. W. | British Library Online Contents | 2001

High Temperature Implantation of Aluminum in 4H Silicon Carbide

Rambach, M. / Bauer, A. J. / Ryssel, H. | British Library Online Contents | 2007