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Fatigue testing of polysilicon--a review
Fatigue testing of polysilicon--a review
Fatigue testing of polysilicon--a review
Sharpe Jr, W. N. (Autor:in) / Bagdahn, J. (Autor:in)
MECHANICS OF MATERIALS ; 36 ; 3-11
01.01.2004
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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|Reliability assessment of polysilicon MEMS structures under mechanical fatigue loading
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|Mechanical Testing of Polysilicon Thin Films with the ISDGy
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