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Preparation and structural characteristics of ZrT4 thin films by plasma enhanced chemical vapor deposition
Preparation and structural characteristics of ZrT4 thin films by plasma enhanced chemical vapor deposition
Preparation and structural characteristics of ZrT4 thin films by plasma enhanced chemical vapor deposition
Lee, W. G. (Autor:in) / Yang, O. B. (Autor:in)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 22 ; 1679-1680
01.01.2003
2 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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